JPH02150075U - - Google Patents
Info
- Publication number
- JPH02150075U JPH02150075U JP5841389U JP5841389U JPH02150075U JP H02150075 U JPH02150075 U JP H02150075U JP 5841389 U JP5841389 U JP 5841389U JP 5841389 U JP5841389 U JP 5841389U JP H02150075 U JPH02150075 U JP H02150075U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- actuator
- adhesive substance
- moves
- application device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 2
- 230000001174 ascending effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5841389U JPH02150075U (en]) | 1989-05-19 | 1989-05-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5841389U JPH02150075U (en]) | 1989-05-19 | 1989-05-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02150075U true JPH02150075U (en]) | 1990-12-25 |
Family
ID=31583999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5841389U Pending JPH02150075U (en]) | 1989-05-19 | 1989-05-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02150075U (en]) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102049366A (zh) * | 2009-11-06 | 2011-05-11 | Ntn株式会社 | 涂布单元以及使用该涂布单元的图案修正装置 |
JP2011115776A (ja) * | 2009-11-06 | 2011-06-16 | Ntn Corp | 塗布ユニットおよびそれを用いたパターン修正装置 |
JP2012024715A (ja) * | 2010-07-26 | 2012-02-09 | Sijtechnology Inc | 液体吐出装置及び液体吐出方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61234039A (ja) * | 1985-04-10 | 1986-10-18 | Oki Electric Ind Co Ltd | 半導体製造装置 |
-
1989
- 1989-05-19 JP JP5841389U patent/JPH02150075U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61234039A (ja) * | 1985-04-10 | 1986-10-18 | Oki Electric Ind Co Ltd | 半導体製造装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102049366A (zh) * | 2009-11-06 | 2011-05-11 | Ntn株式会社 | 涂布单元以及使用该涂布单元的图案修正装置 |
JP2011115776A (ja) * | 2009-11-06 | 2011-06-16 | Ntn Corp | 塗布ユニットおよびそれを用いたパターン修正装置 |
JP2012024715A (ja) * | 2010-07-26 | 2012-02-09 | Sijtechnology Inc | 液体吐出装置及び液体吐出方法 |
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